MECHANICAL AND THERMOPHYSICAL PROPERTIES OF DIAMOND-LIKE CARBON (DLC) FILMS WITH DIFFERENT SP(3)/SP(2) RATIOS

被引：27
|
作者：
DEMICHELIS, F
PIRRI, CF
TAGLIAFERRO, A
BENEDETTO, G
BOARINO, L
SPAGNOLO, R
DUNLOP, E
HAUPT, J
GISSLER, W
机构：
[1] COMMISS EUROPEAN COMMUNITIES, JOINT RES CTR, INST ADV MAT, I-21020 ISPRA, ITALY
[2] IEN GALILEO FERRARIS, I-10135 TURIN, ITALY
来源：
DIAMOND AND RELATED MATERIALS | 1993年 / 2卷 / 5-7期
关键词：
D O I：
10.1016/0925-9635(93)90245-W
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper we present the results of a study of the mechanical and thermal properties of hydrogenated amorphous carbon (a-C:H) films. The hardness and Young's modulus of the films show a rough dependence on the sp3/sp2 ratio, while the thermal expansion coefficient of the films is a definite function of the sp3/sp2 ratio. In fact, it is shown that the thermal expansion coefficient at low temperature (below 130 K) increases with decreasing Sp3/Sp2 ratio. In turn, the thermal conductivity depends on the number of Sp3 sites, although further investigations are needed to detail this dependence. The mechanical properties are indirectly correlated with the thermal ones, since both are sensitive to the sp3 amount.
引用
收藏
页码：890 / 892
页数：3
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