ION-IMPLANTATION SYSTEM FOR NEAR-SURFACE STUDIES

被引：0
|
作者：
VIRDI, GS [1 ]
NATH, N [1 ]
机构：
[1] KURUKSHETRA UNIV,DEPT PHYS,KURUKSHETRA 132119,HARYANA,INDIA
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1995年 / 66卷 / 11期
关键词：
D O I：
10.1063/1.1146092
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
An ion-implantation system designed and fabricated indigenously is described. It consists of a versatile ion source, Einzel lens system, EXH velocity filter, dose measuring equipment, and target chamber. The ion-implantation system fabricated has been used to prepare ion-implanted luminescent phosphors by implanting Sb+ ions into CaS. (C) 1995 American Institute of Physics.
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页码：5244 / 5248
页数：5
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