ZERO-COMPLIANCE AEROSTATIC BEARING FOR AN ULTRA-PRECISION MACHINE

被引：5

作者：

MIZUMOTO, H

MATSUBARA, T

HATA, N

USUKI, M

机构：

[1] Faculty of Engineering, Tottori University, Tottori, 680, Koyama

[2] Nachi-Fujikoshi Co., Ltd, Toyama, 930

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1990年 / 12卷 / 02期

关键词：

aerostatic bearings; ulta-precision machine tools; zero compliance;

D O I：

10.1016/0141-6359(90)90030-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A new type of active air film restrictor is proposed for obtaining a zero-compliance aerostatic thrust bearing. The moving member in the active retrictor is sopported elastically. This active restrictor can therefore be called an aerostatically controlled-restrictor (ACR). Experiments show that the compliance of the thrust bearing with the ACR can be less than 1 nm N-1 when the frequency of the applied load is less than 2 Hz. Pneumatic hammer does nor occur during the experiments. © 1990.

引用

页码：75 / 80

页数：6

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