EPITAXIAL GROWTH OF SILICON CARBIDE

被引:55
|
作者
JENNINGS, VJ
SOMMER, A
CHANG, HC
机构
关键词
D O I
10.1149/1.2424101
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:728 / &
相关论文
共 50 条
  • [31] Plasma-assisted CVD growth of hetero-epitaxial silicon carbide on silicon
    Thwaites, MJ
    Reehal, HS
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1996, 153 (02): : 459 - 463
  • [32] Low temperature selective and lateral epitaxial growth of silicon carbide on patterned silicon substrates
    Jacob, C
    Pirouz, P
    Nishino, S
    SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000, 2001, 353-356 : 127 - 130
  • [33] Selective epitaxial growth of silicon carbide on patterned silicon substrates using hexachlorodisilane and propane
    Jacob, Chacko
    Hong, Moon-Hi
    Chung, Juyong
    Pirouz, Pirouz
    Nishino, Shigehiro
    Materials Science Forum, 2000, 338
  • [34] Multifractal characterization of epitaxial silicon carbide on silicon
    Stefan, Talu
    Sebastian, Stach
    Shikhgasan, Ramazanov
    Dinara, Sobola
    Guseyn, Ramazanov
    MATERIALS SCIENCE-POLAND, 2017, 35 (03): : 539 - 547
  • [35] GROWTH OF EPITAXIAL LAYERS OF GALLIUM NITRIDE ON SILICON CARBIDE AND CORUNDUM SUBSTRATES
    WICKENDEN, DK
    FAULKNER, KR
    BRANDER, RW
    ISHERWOO.J
    JOURNAL OF CRYSTAL GROWTH, 1971, 9 (01) : 158 - +
  • [36] The Manipulation and Alignment of Silicon Carbide Whiskers for Gallium Nitride Epitaxial Growth
    Shen, Huaxiang
    Li, Bo
    Yu, Luke Hao-Ling
    Kitai, Adrian
    JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 2014, 97 (10) : 3077 - 3086
  • [37] Microscopic mechanisms of nitrogen doping in silicon carbide during epitaxial growth
    Yamauchi, Souichiro
    Mizushima, Ichiro
    Yoda, Takashi
    Oshiyama, Atsushi
    Shiraishi, Kenji
    APPLIED PHYSICS EXPRESS, 2024, 17 (08)
  • [38] STUDY OF GROWTH-CONDITIONS OF SILICON-CARBIDE EPITAXIAL LAYERS
    SAIDOV, MS
    SHAMURATOV, KA
    KADYROV, MA
    JOURNAL OF CRYSTAL GROWTH, 1988, 87 (04) : 519 - 522
  • [39] Raman scattering from vapor phase epitaxial growth of silicon carbide on porous 6H-silicon carbide
    Spanier, JE
    Dunne, GT
    Rowland, LB
    Herman, IP
    COMPOUND SEMICONDUCTOR POWER TRANSISTORS II AND STATE-OF-THE-ART PROGRAM ON COMPOUND SEMICONDUCTORS (SOTAPOCS XXXII), 2000, 2000 (01): : 162 - 167
  • [40] Nitrogen doping of epitaxial silicon carbide
    Forsberg, U
    Danielsson, Ö
    Henry, A
    Linnarsson, MK
    Janzén, E
    JOURNAL OF CRYSTAL GROWTH, 2002, 236 (1-3) : 101 - 112