FORMATION OF NEGATIVE-IONS IN CS SPUTTER SOURCES

被引：3
|
作者：
YNTEMA, JL
BILLQUIST, PJ
机构：
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 05期
关键词：
D O I：
10.1063/1.1138852
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：748 / 750
页数：3
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