EFFECT OF CARRIER GAS ON STRUCTURE OF PLASMA POLYMERIZED TETRAFLUOROETHYLENE FILMS

被引：7
|
作者：
NAKANO, T
KASAMA, Y
OHKI, Y
YAHAGI, K
机构：
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1985年 / 24卷 / 01期
关键词：
D O I：
10.1143/JJAP.24.83
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：83 / 86
页数：4
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