SIMPLE LOW-COST MICROWAVE PLASMA SOURCE

被引：13

作者：

MEINERS, LG

ALFORD, DB

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1986年 / 57卷 / 02期

关键词：

D O I：

10.1063/1.1138961

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：164 / 166

页数：3

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