PHYSICAL PRINCIPLES OF ELECTRON-BEAM LITHOGRAPHY

被引：0
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作者：
AHMED, H
机构：
来源：
SCIENCE PROGRESS | 1986年 / 70卷 / 280期
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中图分类号：
G40 [教育学];
学科分类号：
040101 ; 120403 ;
摘要：
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页码：473 / 487
页数：15
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