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SUB-MICRON MOSFET FABRICATION WITH X-RAY-LITHOGRAPHY

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作者：
JAEGER, RP
KARNEZOS, M
NAKANO, H
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来源：
PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS | 1985年 / 537卷
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
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页码：75 / 84
页数：10
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