ION-IMPLANTATION INTO STRAINED-LAYER SUPERLATTICES

被引：17
|
作者：
PICRAUX, ST
ARNOLD, GW
MYERS, DR
DAWSON, LR
BIEFELD, RM
FRITZ, IJ
ZIPPERIAN, TE
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1985年 / 7-8卷 / MAR期
关键词：
D O I：
10.1016/0168-583X(85)90598-1
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：453 / 460
页数：8
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