STRUCTURAL UNIFORMITY OF MULTILAYERED TUNGSTEN-CARBON BRAGG REFLECTORS PREPARED BY RF MAGNETRON SPUTTERING

被引：3
|
作者：
TAKENAKA, H [1 ]
TAKAOKA, H [1 ]
ISHII, Y [1 ]
HASHIZUME, H [1 ]
机构：
[1] TOKYO INST TECHNOL, ENGN MAT RES LAB, MIDORI KU, YOKOHAMA, KANAGAWA 227, JAPAN
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1989年 / 60卷 / 07期
关键词：
D O I：
10.1063/1.1140865
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：2021 / 2023
页数：3
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