A MATHEMATICAL-MODEL FOR DETERMINING FILM THICKNESS OF PHOTORESISTS

被引：0
|
作者：
FERGUSON, S [1 ]
GALLANT, K [1 ]
LINDSAY, W [1 ]
机构：
[1] ALLIED CORP,BUFFALO RES LAB,BUFFALO,NY 14210
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1983年 / 186卷 / AUG期
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D O I：
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：11 / ACSC
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