GROWTH OF BORON WHISKERS AND RIBBONS IN A LOW-PRESSURE B2H6+HE+H-2 PLASMA

The relationship between the growth conditions and morphological and structural characteristics of boron whiskers grown in plasma enhanced chemical vapor deposition from B2H6 + He + H2 was investigated for the first time. The conditions were as follows: plasma power was 2 kW, pressure was 200 Pa, total gas flow rate was 100 SCCM, substrate temperature ranged from 700 to 880°C, diborance concentration ranged from 0.25 to 1.5 vol%, and hydrogen concentration ranged from 5 to 30 vol%. The whisker growth was preferred with the increased Ts, which accompanied preferred orientation of 〈110〉 to the surface in a hexagonal assignment. The effect of hydrogen or diborane concentration on the whisker growth was prominent, but all whisker samples showed the 〈100〉 preferred orientation. © 1990.