COHERENT PRECIPITATION OF SILICON-NITRIDE IN SILICON

被引：12
|
作者：
KAUSHIK, VS
DATYE, AK
KENDALL, DL
MARTINEZTOVAR, B
MYERS, DR
机构：
[1] UNIV NEW MEXICO,DEPT ELECT & COMP ENGN,ALBUQUERQUE,NM 87131
[2] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
来源：
APPLIED PHYSICS LETTERS | 1988年 / 52卷 / 21期
关键词：
D O I：
10.1063/1.99722
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1782 / 1784
页数：3
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