GAS-PHASE SYNTHESIS OF NANO-STRUCTURED SEMICONDUCTORS

被引：0
|
作者：
GOOSSENS, A
SCHOONMAN, J
机构：
来源：
EUROPEAN JOURNAL OF SOLID STATE AND INORGANIC CHEMISTRY | 1995年 / 32卷 / 7-8期
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中图分类号：
O61 [无机化学];
学科分类号：
070301 ; 081704 ;
摘要：
A short review is given of current research activities in the field of nanostructured semiconductors. The utilisation of advanced gas-phase techniques is highlighted and it is indicated that these methods are very promising and open up scarcely explored opportunities for the synthesis of this class of materials. Vapour-liquid-solid (VLS) growth of boron phosphide, particle precipitation aided CVD (pp-CVD) of titanium dioxide, and Laser CVD of the ternary system Si-C-N are briefly discussed as good examples of gas-phase synthetic routes towards nano-structured semiconductor surfaces.
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页码：779 / 786
页数：8
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