SURFACTANT-MEDIATED CRYSTAL-GROWTH OF SEMICONDUCTORS

被引:148
|
作者
KANDEL, D [1 ]
KAXIRAS, E [1 ]
机构
[1] HARVARD UNIV,DIV APPL SCI,CAMBRIDGE,MA 02138
关键词
D O I
10.1103/PhysRevLett.75.2742
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The influence of surfactants on semiconductor thin film growth is studied by means of a mesoscopic model combined with first principles calculations. We introduce a new kinetic mechanism that explains how surfactants induce layer-by-layer growth. The experimentally observed high density of 2D islands is a natural consequence of the chemical passivation of step edges, as well as flat surfaces, by the surfactant. In heteroepitaxial growth, we take strain effects into account, which leads to layer-by-layer growth at low temperatures and three-dimensional growth at high temperatures, in agreement with experiments.
引用
收藏
页码:2742 / 2745
页数:4
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