PREPARATION AND CHARACTERIZATION OF AU-SIO-2 RADIO-FREQUENCY CO-SPUTTERED THIN-FILMS

被引：2
|
作者：
ARMIGLIATO, A
BENTINI, GG
GUERRI, S
OSTOJA, P
MORETTINI, L
机构：
[1] CNR,LAMEL,BOLOGNA,ITALY
[2] IST MET,BOLOGNA,ITALY
来源：
THIN SOLID FILMS | 1976年 / 33卷 / 03期
关键词：
D O I：
10.1016/0040-6090(76)90106-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：355 / 362
页数：8
相关论文
共 50 条
  • [41] PIEZORESISTIVE PROPERTIES OF RF-SPUTTERED NICR/AU-SIO2 CERMET THIN-FILMS
    BANOVEC, A
    POZUN, K
    PRACEK, B
    VACUUM, 1992, 43 (5-7) : 511 - 513
  • [42] CHARACTERIZATION OF RADIO-FREQUENCY DEPOSITED THIN CARBON-FILMS
    SIPERKO, LM
    BRENNA, JT
    CREASY, WR
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 1533 - 1537
  • [43] Neutron irradiation effect on radio-frequency magnetron-sputtered GaN thin films and Au/GaN Schottky diodes
    Wang, CW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (05): : 1821 - 1826
  • [44] Magnetic Properties of Al-SiC Co-Sputtered Films Grown by Radio Frequency Sputtering
    Liu, Xingwei
    Zhen, Congmian
    Liu, Yuanbo
    Liu, Shiyan
    Zhou, Hongjuan
    Li, Xiuling
    Hou, Denglu
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2010, 10 (11) : 7036 - 7039
  • [45] PREPARATION AND CHARACTERIZATION OF REACTIVELY SPUTTERED SILICON-NITRIDE THIN-FILMS
    GHOSH, SK
    HATWAR, TK
    THIN SOLID FILMS, 1988, 166 (1-2) : 359 - 366
  • [46] SURFACE CHARACTERIZATION OF RADIO-FREQUENCY WATER PLASMA TREATED AND ANNEALED POLYCRYSTALLINE TIN OXIDE THIN-FILMS
    TARLOV, MJ
    EVANS, JF
    CHEMISTRY OF MATERIALS, 1990, 2 (01) : 49 - 60
  • [47] DEPOSITION AND CHARACTERIZATION OF PBTIO3 THIN-FILMS GROWN BY RADIO-FREQUENCY SPUTTERING ON MGO(100)
    KIM, S
    BAIK, S
    THIN SOLID FILMS, 1995, 266 (02) : 205 - 211
  • [48] Electrical Properties of Radio-Frequency Sputtered HfO2 Thin Films for Advanced CMOS Technology
    Sarkar, Pranab Kumar
    Roy, Asim
    ADVANCED MATERIALS AND RADIATION PHYSICS (AMRP-2015), 2015, 1675
  • [49] Structural and optical characterization of Sb-doped ZnO co-sputtered thin films
    El-Raheem, M. M. Abd
    Amin, S. A.
    Alharbi, M. A.
    Badawi, A. M.
    JOURNAL OF OPTICAL TECHNOLOGY, 2016, 83 (06) : 375 - 384
  • [50] Radio-frequency reactively sputtered VOx thin films deposited at different oxygen flows
    Lourenco, A
    Gorenstein, A
    Passerini, S
    Smyrl, WH
    Fantini, MCA
    Tabacniks, MH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (02) : 706 - 711
12345