PREPARATION AND CHARACTERIZATION OF AU-SIO-2 RADIO-FREQUENCY CO-SPUTTERED THIN-FILMS

被引：2
|
作者：
ARMIGLIATO, A
BENTINI, GG
GUERRI, S
OSTOJA, P
MORETTINI, L
机构：
[1] CNR,LAMEL,BOLOGNA,ITALY
[2] IST MET,BOLOGNA,ITALY
来源：
THIN SOLID FILMS | 1976年 / 33卷 / 03期
关键词：
D O I：
10.1016/0040-6090(76)90106-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：355 / 362
页数：8
相关论文
共 50 条
  • [1] CO-SPUTTERED AU-SIO2 CERMET FILMS
    MILLER, NC
    SHIRN, GA
    APPLIED PHYSICS LETTERS, 1967, 10 (03) : 86 - &
  • [2] RADIO-FREQUENCY SPUTTERED INDIUM TIN OXIDE THIN-FILMS
    RUSSAK, M
    DECARLO, J
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (03): : 1563 - 1564
  • [3] Radio-frequency magnetron co-sputtered Ge-Sb-Te phase change thin films
    Bouska, Marek
    Nazabal, Virginie
    Gutwirth, Jan
    Halenkovic, Tomas
    Nemec, Petr
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2021, 569 (569)
  • [4] RADIO-FREQUENCY SPUTTERED NIFE FILMS ON AU
    AHN, KY
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (02): : 626 - 628
  • [5] DIMENSIONAL VARIATIONS OF ELECTRONIC PROPERTIES OF RADIO-FREQUENCY SPUTTERED THIN-FILMS
    MURRAY, H
    REVUE DE PHYSIQUE APPLIQUEE, 1975, 10 (06): : 427 - 432
  • [6] MICROSTRUCTURE OF MAGNETRON CO-SPUTTERED COCR THIN-FILMS
    HONG, M
    NAKAHARA, S
    VANDOVER, RB
    BOONE, T
    APPLIED PHYSICS LETTERS, 1986, 49 (19) : 1308 - 1310
  • [7] PREPARATION AND PROPERTIES OF CUINSE2 THIN-FILMS PRODUCED BY SELENIZATION OF CO-SPUTTERED CU-IN FILMS
    SCHMIDT, J
    ROSCHER, HH
    LABUSCH, R
    THIN SOLID FILMS, 1994, 251 (02) : 116 - 120
  • [8] PREPARATION AND CHARACTERIZATION OF RADIO-FREQUENCY-SPUTTERED BA2SI2TIO8 THIN-FILMS
    LI, Y
    KAWA, PM
    YOUDELIS, WV
    CHAO, BS
    YAMAUCHI, H
    JOURNAL OF MATERIALS SCIENCE, 1993, 28 (15) : 4104 - 4112
  • [9] rf reactive co-sputtered Au-Ag alloy nanoparticles in SiO2 thin films
    Sangpour, P.
    Akhavan, O.
    Moshfegh, A. Z.
    APPLIED SURFACE SCIENCE, 2007, 253 (18) : 7438 - 7442
  • [10] Structure and optical characterization of GaP-SiO2 co-sputtered films
    Chai Yuesheng
    Yang Meihui
    Zhang Mingang
    Sun Gang
    RARE METALS, 2008, 27 (06) : 580 - 585
12345