共 50 条
- [22] Current status of Mo-Si multilayer formation in ASET for low-defect-density mask blanks for EUV lithography PHOTOMASK TECHNOLOGY 2006, PTS 1 AND 2, 2006, 6349
- [24] The evolution of low defect density structures in silicon-on-sapphire thin films during post-ion implantation heat treatments Microscopy of Semiconducting Materials, 2005, 107 : 363 - 366
- [25] Bulk contribution to magnetotransport properties of low-defect-density Bi2Te3 topological insulator thin films PHYSICAL REVIEW MATERIALS, 2018, 2 (04):
- [27] Effect of Solid-State Epitaxial Recrystallization on Defect Density in Ultrathin Silicon-on-Sapphire Layers Physics of the Solid State, 2019, 61 : 2353 - 2358
- [30] Characterization of low-defect-density a-plane and m-plane GaN and fabrication of a-plane and m-plane LEDs PHYSICS AND SIMULATION OF OPTOELECTRONIC DEVICES XV, 2007, 6468