LOW-DEFECT-DENSITY SILICON ON SAPPHIRE

被引:8
|
作者
AMANO, J
CAREY, KW
机构
关键词
D O I
10.1016/0022-0248(82)90447-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
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页码:296 / 303
页数:8
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