Application of nanoporous anodic alumina by gas microsystem design

被引：0
|
作者：
Belahurau, Ya. A. [1 ]
Shukevich, Ya., I [1 ]
Barkaline, V. V. [1 ]
Khatko, V. V. [1 ]
Taratyn, I. A. [1 ]
机构：
[1] Belarusian Natl Tech Univ, Minsk, BELARUS
来源：
DEVICES AND METHODS OF MEASUREMENTS | 2011年 / 02期
关键词：
nanoporous anodic alumina substrate; gas sensor microsystem;
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Influence of the porosity of anodic alumina substrate on basic characteristics of four gas sensor microsystem has been determined. Dependences of the tensor components of modulus of elasticity and thermal-conductivity coefficients as a function of alpha-Al2O3 porosity obtained by FEA were utilized in the calculations.
引用
收藏
页码：59 / 65
页数：7
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