DISCHARGE CHARACTERISTICS OF KRF AND ARF EXCIMER LASER SYSTEMS IN A DOUBLE PULSED LARGE VOLUME DEVICE

被引：0
|
作者：
SZE, RC [1 ]
LOREE, TR [1 ]
BRAU, C [1 ]
ROCKWOOD, SD [1 ]
机构：
[1] UNIV CALIF,LOS ALAMOS SCI LAB,LOS ALAMOS,NM 87544
来源：
BULLETIN OF THE AMERICAN PHYSICAL SOCIETY | 1977年 / 22卷 / 02期
关键词：
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
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页码：187 / 187
页数：1
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