CONTRIBUTION OF THE TEMPERATURE-MEASUREMENT USING THERMOELECTRICAL MICRO-PROBE IN THE FIELD OF THERMAL MICROSCOPY

被引：2
|
作者：
THIERY, L
PRENEL, JP
PORCAR, R
机构：
来源：
JOURNAL DE PHYSIQUE III | 1994年 / 4卷 / 09期
关键词：
D O I：
10.1051/jp3:1994237
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
New non destructive investigation techniques by means of photoacoustic and photothermal phenomena have appeared and are growing up for more than 15 years. The low thermal inertia of thermoelectrical microprobes allows the detection of thermal waves produced around an absorbing surface heated by a modulated laser beam. It is possible to measure thermal characteristics of thin samples in transmission mode. On the other hand, the thermal microscopy can be operated in the reflection mode for surface imaging or microcircuit defects detection; in this case the lateral resolution is given by the excitation beam diameter (a few micrometers).
引用
收藏
页码：1737 / 1750
页数：14
相关论文
共 50 条
  • [1] ION TEMPERATURE-MEASUREMENT USING A KATSUMATA PROBE
    HAYOZ, R
    EGGER, E
    SCHNEIDER, H
    VAUCHER, BG
    HELVETICA PHYSICA ACTA, 1983, 56 (04): : 934 - 937
  • [2] REMOTE TEMPERATURE-MEASUREMENT USING AN ACOUSTIC PROBE
    HUSSON, D
    BENNETT, SD
    KINO, GS
    APPLIED PHYSICS LETTERS, 1982, 41 (10) : 915 - 917
  • [3] A photocantilever: an integrated micro-probe for near-field optical microscopy
    Fukuzawa, K
    Tanaka, Y
    Kuwano, H
    Yoshikawa, H
    Ohkubo, T
    Kato, T
    NEAR-FIELD OPTICS: PHYSICS, DEVICES, AND INFORMATION PROCESSING, 1999, 3791 : 21 - 31
  • [4] Measurements of ultrasonic field and temperature by a fiber optic micro-probe
    Nakamura, Kentaro, 1600, Acoustical Soc Jpn, Tokyo, Japan (21):
  • [5] STUDY OF TEMPERATURE-MEASUREMENT ERROR OF A FIBEROPTIC PROBE IN A MICROWAVE FIELD
    HAN, YP
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 1995, 10 (01) : 62 - 66
  • [6] THE CONTRIBUTION OF PRECISE TEMPERATURE-MEASUREMENT AND CONTROL TO THERMAL-ANALYSIS
    TYE, RP
    GARDNER, RL
    THERMOCHIMICA ACTA, 1993, 226 : 343 - 351
  • [7] TEMPERATURE-MEASUREMENT USING A PNEUMATIC PROBE FOR ELECTRICALLY AUGMENTED FLAMES
    KISHIMOTO, K
    BULLETIN OF THE JSME-JAPAN SOCIETY OF MECHANICAL ENGINEERS, 1980, 23 (179): : 724 - 731
  • [8] Micro-probe measurement in pulsed high magnetic fields
    Ohmichi, E
    Osada, T
    PHYSICA B-CONDENSED MATTER, 2004, 346 : 509 - 513
  • [9] EARLY DAYS IN ELECTRON-MICROSCOPY AND MICRO-PROBE ANALYSIS
    COSSLETT, VE
    SOUTH AFRICAN JOURNAL OF SCIENCE, 1980, 76 (11) : 494 - 497
  • [10] Temperature control of an SThM micro-probe with an heat source estimator and a lock-in measurement
    Lenczner, M.
    Yang, B.
    Cogan, S.
    Domas, S.
    Ke, D.
    Couturier, R.
    Renault, D.
    Koehler, B.
    Janus, P.
    2016 17TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME), 2016,
12345