CROSS-SECTIONAL CHARACTERIZATION OF INTEGRATED-CIRCUIT STRUCTURES BY SCANNING ELECTRON-MICROSCOPY

被引：0

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作者：

KUMAR, AV

SARMA, GH

PRABHAKAR, A

机构：

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1987年 / 6卷 / 06期

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D O I：

10.1007/BF01770907

中图分类号：

T [工业技术];

学科分类号：

08 ;

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页码：633 / 634

页数：2

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