SECONDARY ION MASS-SPECTROMETRIC IMAGE DEPTH PROFILE ANALYSIS OF THIN-LAYERS

被引：7

作者：

CHU, PK ^{[1
]}

HARRIS, WC ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,BAKER LAB,DEPT CHEM,ITHACA,NY 14853

来源：

ANALYTICAL CHEMISTRY | 1982年 / 54卷 / 13期

关键词：

D O I：

10.1021/ac00250a017

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

引用

页码：2208 / 2210

页数：3

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