FILM MODIFICATION BY LOW-ENERGY ION-BOMBARDMENT DURING DEPOSITION

被引：117
|
作者：
ROSSNAGEL, SM
CUOMO, JJ
机构：
来源：
THIN SOLID FILMS | 1989年 / 171卷 / 01期
关键词：
D O I：
10.1016/0040-6090(89)90040-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：143 / 156
页数：14
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