LOW-PRESSURE METALORGANIC CHEMICAL VAPOR-DEPOSITION OF INP AND RELATED-COMPOUNDS

被引：86

|

作者：

RAZEGHI, M

POISSON, MA

LARIVAIN, JP

DUCHEMIN, JP

机构：

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1983年 / 12卷 / 02期

关键词：

D O I：

10.1007/BF02651138

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：371 / 395

页数：25

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