SPUTTERING OF FILM ELECTRODE AT NEGATIVE CORONA POINT-TO-PLANE DISCHARGE

被引：0

作者：

BABINETS, OL ^{[1
]}

RATNIKOV, EV ^{[1
]}

机构：

[1] VI LENIN STATE UNIV,MINSK,BESSR

来源：

IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA | 1975年 / 02期

关键词：

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：141 / 142

页数：2

共 50 条

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