ULTRAVIOLET-VISIBLE ELLIPSOMETRIC SPECTRA AND OPTICAL-CONSTANTS OF SPUTTERED AMORPHOUS-SILICON

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作者：

CHEN, SG

JIANG, RR

MO, D

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CHINESE PHYSICS | 1985年 / 5卷 / 01期

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O4 [物理学];

学科分类号：

0702 ;

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页码：171 / 175

页数：5

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