X-ray photo-electron spectromicroscopy

We report on the design implementation performances and experience of usage of the X-ray microscope system MAXIMUM. The project that began in 1987 culminated in 1992, achieving the design goal of a spatial resolution of sub 0.1 mu m at the same time as an energy resolution of better than 250 meV. The system is based on the use of Schwarzschild optics coated with multilayers. We discuss the design implementation and alignment techniques used in achieving the design goals. We also clarify some issues related to the ultimate resolution of scanning Systems in the presence of signal noise.