LOCAL GENERATION OF THE MELTED PHASE DURING IMPULSE LASER SILICON ANNEALING

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作者：
PRISTREM, AM
DEMCHUK, AV
DANILOVICH, NI
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ZHURNAL TEKHNICHESKOI FIZIKI | 1986年 / 56卷 / 06期
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O59 [应用物理学];
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页码：1220 / 1224
页数：5
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