NONDESTRUCTIVE DEPTH PROFILING BY SPECTROSCOPIC ELLIPSOMETRY

被引：113
|
作者：
VEDAM, K
MCMARR, PJ
NARAYAN, J
机构：
[1] N CAROLINA STATE UNIV,DEPT MAT ENGN,RALEIGH,NC 27650
[2] MICROELECTR CTR N CAROLINA,RES TRIANGLE PK,NC 27709
来源：
APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 04期
关键词：
D O I：
10.1063/1.96156
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：339 / 341
页数：3
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