ELLIPSOMETRIC SPECTRUM AND OPTICAL-PROPERTIES OF ION-IMPLANTED SILICON

被引：0
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作者：
MO, D
YE, XJ
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来源：
CHINESE PHYSICS | 1982年 / 2卷 / 04期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
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页码：915 / 921
页数：7
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