INSITU ELLIPSOMETRY COMPARISON OF THE NUCLEATION AND GROWTH OF SPUTTERED AND GLOW-DISCHARGE A-SI-H

被引：12
|
作者：
COLLINS, RW
CAVESE, JM
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 62卷 / 10期
关键词：
D O I：
10.1063/1.339132
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：4146 / 4153
页数：8
相关论文
共 50 条
  • [21] DENSITY OF THE GAP STATES IN UNDOPED AND DOPED GLOW-DISCHARGE A-SI-H
    VANECEK, M
    KOCKA, J
    STUCHLIK, J
    KOZISEK, Z
    STIKA, O
    TRISKA, A
    SOLAR ENERGY MATERIALS, 1983, 8 (04): : 411 - 423
  • [22] INITIAL NUCLEATION OF A-SI-H - AN INSITU ELLIPSOMETRY STUDY OF THE EFFECT OF DEPOSITION PROCEDURE
    COLLINS, RW
    CAVESE, JM
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 269 - 272
  • [23] CW LASER CRYSTALLIZATION OF GLOW-DISCHARGE A-SI-H ON GLASS SUBSTRATES
    CALDER, ID
    KAVANAGH, KL
    NAGUIB, HM
    BRASSARD, C
    CURRIE, JF
    DEPELSENAIRE, P
    GROLEAU, R
    JOURNAL OF ELECTRONIC MATERIALS, 1982, 11 (02) : 303 - 320
  • [24] GLOW-DISCHARGE OPTICAL SPECTROSCOPY MEASUREMENT OF DOPANT CONCENTRATIONS IN A-SI-H
    ZESCH, JC
    LUJAN, RA
    DELINE, VR
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 273 - 277
  • [25] HYDROGEN ELIMINATION DURING THE GLOW-DISCHARGE DEPOSITION OF A-SI-H ALLOYS
    KAMPAS, FJ
    GRIFFITH, RW
    APPLIED PHYSICS LETTERS, 1981, 39 (05) : 407 - 409
  • [26] TIME RESOLVED SPECTROSCOPY OF THE PHOTOINDUCED ABSORPTION IN GLOW-DISCHARGE A-SI-H
    RAY, S
    VARDENY, Z
    TAUC, J
    JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 555 - 557
  • [27] GLOW-DISCHARGE DEPOSITED A-SI-H,AL THIN-FILMS
    ANDUJAR, JL
    ANDREU, J
    SARDIN, G
    DELGADO, JC
    ESTEVE, J
    MORENZA, JL
    SOLAR ENERGY MATERIALS, 1987, 15 (03): : 167 - 173
  • [28] GROWTH-PROCESSES OF RF GLOW-DISCHARGE DEPOSITED A-SI-H AND A-GE-H FILMS
    ANTOINE, AM
    DREVILLON, B
    CABARROCAS, PRI
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 769 - 772
  • [29] SURFACE-REACTIONS DURING THE A-SI-H GROWTH IN THE DIODE AND TRIODE GLOW-DISCHARGE REACTORS
    GUIZOT, JL
    NOMOTO, K
    MATSUDA, A
    SURFACE SCIENCE, 1991, 244 (1-2) : 22 - 38
  • [30] TRANSPORT-PROPERTIES OF A-SI-H PREPARED BY RF AND DC GLOW-DISCHARGE
    MORGAN, M
    JANSEN, F
    GRAMMATICA, S
    KUHMAN, D
    MORT, J
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) : 77 - 80
12345