VACUUM-SYSTEMS - A REVIEW OF THE BASIC COMPONENTS

被引：0

作者：

VANDERLINDEN, D

机构：

来源：

INDUSTRIAL RESEARCH & DEVELOPMENT | 1983年 / 25卷 / 04期

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D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：139 / &

共 50 条

[1] VACUUM-SYSTEMS
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[J]. OPTICAL SPECTRA, 1979, 13 (01): : 46 - 46
[2] VACUUM-SYSTEMS
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[J]. OPTICAL SPECTRA, 1978, 12 (01): : 33 - 33
[3] VACUUM-SYSTEMS
不详
[J]. OPTICAL SPECTRA, 1980, 14 (01): : 52 - 52
[4] VACUUM-SYSTEMS FOR MICROELECTRONICS
OHANLON, JF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 228 - 232
[5] VACUUM-SYSTEMS - OVERVIEW
MCGARR, DM
[J]. RESEARCH-DEVELOPMENT, 1973, 24 (09): : 68 - &
[6] VACUUM-SYSTEMS FOR VACUUM MICROBALANCES
ROBENS, E
[J]. VACUUM, 1985, 35 (01) : 1 - 4
[7] VALVES FOR VACUUM-SYSTEMS
ROBSON, F
[J]. PUMPS-POMPES-PUMPEN, 1973, (87): : 544 - 546
[8] VACUUM-SYSTEMS FOR MICROELECTRONICS
WAITS, RK
[J]. SOLID STATE TECHNOLOGY, 1985, 28 (11) : 93 - 93
[9] THE LEP VACUUM-SYSTEMS
HILLERET, N
[J]. ONDE ELECTRIQUE, 1985, 65 (04): : 32 - 37
[10] VACUUM-SYSTEMS IN THE CPI
PATTON, PW
[J]. CHEMICAL ENGINEERING PROGRESS, 1983, 79 (12) : 56 - 61