VACUUM-SYSTEMS FOR MICROELECTRONICS

被引：0

作者：

WAITS, RK

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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引用

页码：93 / 93

页数：1

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[1] VACUUM-SYSTEMS FOR MICROELECTRONICS
OHANLON, JF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02): : 228 - 232
[2] FLOW MEASUREMENT AND CONTROL IN VACUUM-SYSTEMS FOR MICROELECTRONICS PROCESSING
SULLIVAN, JJ
JACOBS, RP
[J]. SOLID STATE TECHNOLOGY, 1986, 29 (10) : 113 - 118
[3] VACUUM-SYSTEMS
不详
[J]. OPTICAL SPECTRA, 1979, 13 (01): : 46 - 46
[4] VACUUM-SYSTEMS
不详
[J]. OPTICAL SPECTRA, 1978, 12 (01): : 33 - 33
[5] VACUUM-SYSTEMS
不详
[J]. OPTICAL SPECTRA, 1980, 14 (01): : 52 - 52
[6] VACUUM-SYSTEMS - OVERVIEW
MCGARR, DM
[J]. RESEARCH-DEVELOPMENT, 1973, 24 (09): : 68 - &
[7] VACUUM-SYSTEMS FOR VACUUM MICROBALANCES
ROBENS, E
[J]. VACUUM, 1985, 35 (01) : 1 - 4
[8] VALVES FOR VACUUM-SYSTEMS
ROBSON, F
[J]. PUMPS-POMPES-PUMPEN, 1973, (87): : 544 - 546
[9] THE LEP VACUUM-SYSTEMS
HILLERET, N
[J]. ONDE ELECTRIQUE, 1985, 65 (04): : 32 - 37
[10] VACUUM-SYSTEMS IN THE CPI
PATTON, PW
[J]. CHEMICAL ENGINEERING PROGRESS, 1983, 79 (12) : 56 - 61