EFFECT OF RECYCLING ON THE AXIAL DISTRIBUTION OF COATING THICKNESS IN A LOW-PRESSURE CVD REACTOR

被引：8
|
作者：
COLLINGHAM, ME [1 ]
ZOLLARS, RL [1 ]
机构：
[1] WASHINGTON STATE UNIV,DEPT CHEM ENGN,PULLMAN,WA 99164
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1989年 / 136卷 / 03期
关键词：
D O I：
10.1149/1.2096745
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：787 / 794
页数：8
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