RELIABLE THIN OXIDE NITRIDE OXIDE (ONO) FILMS PRODUCED BY MULTIPLE RAPID THERMAL-PROCESSING

被引：0
|
作者：
SHIH, DK
KWONG, DL
LEE, S
机构：
[1] UNIV TEXAS,MICROELECTR RES CTR,DEPT ELECT & COMP ENGN,AUSTIN,TX 78712
[2] NCR CORP,COLORADO SPRINGS,CO 80916
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：C123 / C123
页数：1
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