DIRECT SYNTHESIS OF TITANIUM NITRIDE BY LASER-PLASMA

被引：1
|
作者：
THOMANN, AL
HERMANN, J
BOULMERLEBORGNE, C
机构：
[1] Universite d'Orleans, Orleans
来源：
JOURNAL DE PHYSIQUE IV | 1994年 / 4卷 / C4期
关键词：
D O I：
10.1051/jp4:1994410
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
Direct nitriding of titanium sample submitted to the action of a nitrogen plasma created by a TEA-carbon dioxide laser beam interacting with the target in a nitrogen atmosphere was studied. The synthesized films were analyzed by scanning electron microscopy (SEM) and rugosity measurements and their chemical composition were investigated on the surface by X ray photoelectron spectroscopy (XPS), and in the material bulk by Rutherford backscattering (RBS). Crystalline phases were characterized by X ray diffraction (XRD).
引用
收藏
页码：55 / 58
页数：4
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