SIMULTANEOUS GROWTH OF RHOMBOHEDRAL AND AMORPHOUS BORON FILMS IN A LOW-PRESSURE B2H6+H2+HE PLASMA

被引：17
|
作者：
KOMATSU, S
MORIYOSHI, Y
机构：
来源：
JOURNAL OF CRYSTAL GROWTH | 1988年 / 89卷 / 04期
关键词：
D O I：
10.1016/0022-0248(88)90219-9
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页码：560 / 570
页数：11
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