IRON REDISTRIBUTION AND COMPENSATION MECHANISMS IN SEMI-INSULATING SI-IMPLANTED INP

被引：17
|
作者：
BAHIR, G
MERZ, JL
ABELSON, JR
SIGMON, TW
机构：
[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106
[2] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305
来源：
JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 03期
关键词：
D O I：
10.1063/1.343086
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1009 / 1017
页数：9
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