NEW PREPARATION METHOD FOR LARGE AREA ELECTRON-TRANSPARENT SILICON SAMPLES

被引：30
|
作者：
KOLBESEN, BO [1 ]
MAYER, KR [1 ]
SCHUH, GE [1 ]
机构：
[1] SIEMENS AG,GRUNDLAGENENTWICKL HALBLEITER,POB 460705,8 MUNICH 46,FED REP GER
来源：
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1975年 / 8卷 / 03期
关键词：
D O I：
10.1088/0022-3735/8/3/015
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：197 / 199
页数：3
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