3-DIMENSIONAL MICROMACHINING OF SILICON PRESSURE SENSOR INTEGRATING RESONANT STRAIN-GAUGE ON DIAPHRAGM

被引：47
|
作者：
IKEDA, K
KUWAYAMA, H
KOBAYASHI, T
WATANABE, T
NISHIKAWA, T
YOSHIDA, T
HARADA, K
机构：
[1] Corporate R, D Department 3, Yokogawa Electric Corporation, Musashino-shi, Tokyo, 180
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1990年 / 23卷 / 1-3期
关键词：
D O I：
10.1016/0924-4247(90)87078-W
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A method of fabricating a novel pressure sensor is presented. The sensor has resonant strain gauges built into micro vacuum cavities on the surface of the diaphragm. The resonant strain gauge has a resonator the natural frequency of which is modulated by the strain in the diaphragm surface. The resonator and the vacuum cavity of the strain gauge are fabricated by a self-aligning selective epitaxial method and a hybrid selective etching method; a unique vacuum-sealing technique is used to make the vacuum cavity. © 1990.
引用
收藏
页码：1007 / 1010
页数：4
相关论文
共 28 条
  • [21] SELF-RECOVERING 3-DIMENSIONAL MICRO PORE STRUCTURE PRESSURE SENSOR USING SHAPE MEMORY POLYMER
    Park, Byung-geon
    Jung, Young
    Shin, Myung-gyu
    Ko, Jongsoo
    Cho, Hanchul
    2020 33RD IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2020), 2020, : 685 - 688
  • [22] Novel Planar Strain Sensor Design for Capturing 3-Dimensional Fingertip Forces from Patients Affected by Hand Paralysis
    Carducci, Jacob
    Olds, Kevin
    Krakauer, John W.
    Xu, Jing
    Brown, Jeremy D.
    SENSORS, 2022, 22 (19)
  • [23] Polyurethane Foam Embedded Pressure Sensor Array with 3-D Printed Structure and Thin MEMS Strain Gauge for Car Seat
    The University of Tokyo, School of Engineering, Department of Precision Engineering, Tokyo
    113-8656, Japan
    不详
    305-8564, Japan
    IEEE Sensors J., 24 (40595-40602): : 40595 - 40602
  • [24] A fiber-optic Fabry-Perot pressure sensor with the Si3N4/SiO2/Si3N4 diaphragm fabricated using micromachining technology
    Kim, MG
    Park, J
    Kang, SW
    Sohn, BK
    SMART ELECTRONICS AND MEMS, 1997, 3242 : 347 - 353
  • [25] Two-dimensional silicon smart tactile image-sensor with single sensing diaphragm actuated by vibrating pressure for simultaneous detection of force and object hardness distributions
    Takao, H
    Yawata, M
    Sawada, K
    Ishida, M
    MEMS 2006: 19TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST, 2006, : 602 - 605
  • [26] A Novel Clinical Method for Quantification of Myocardial Work and Stroke Work by Left Ventricular Pressure-Strain and Pressure-Volume Loop Area Constructed by 3-Dimensional Echocardiography
    Yoshizane, Takashi
    Tanaka, Ryuhei
    Otsuka, Mako
    Nagaya, Maki
    Minatoguchi, Shingo
    Horio, Shuntaro
    Ueno, Takahiro
    Yagasaki, Hiroto
    Miwa, Hirotaka
    Abe, Shintaro
    Goto, Yoshiaki
    Kato, Takashi
    Warita, Shunichiro
    Kojima, Tai
    Iwama, Makoto
    Ono, Koji
    Arai, Masazumi
    Noda, Toshiyuki
    Watanabe, Sachiro
    Kawasaki, Masanori
    CIRCULATION, 2018, 138
  • [27] Left Atrial Endocardial Surface Area Strain Assessed by 3-Dimensional Speckle Tracking Imaging is a Useful Method in Assessing Left Ventricular End-Diastolic Pressure
    Akita, Nobukatsu
    Ohte, Nobuyuki
    Wakami, Kazuaki
    Kikuchi, Shohei
    Ikehara, Noriyuki
    Fujita, Hiroshi
    Goto, Toshihiko
    Fukuta, Hidekatsu
    Tani, Tomomitsu
    Kimura, Genjiro
    CIRCULATION, 2011, 124 (21)
  • [28] Label-Free Optical Biochemical Sensor Realized by a Novel Low-Cost Bulk-Silicon based CMOS-Compatible 3-Dimensional Optoelectronic IC (OEIC) Platform
    Song, Junfeng
    Luo, Xianshu
    Kee, Jack Sheng
    Li, Chao
    Lo, Guo-Qiang
    2014 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM), 2014,
123