RIE PLANARIZATION PROCESS FOR MAGNETIC-BUBBLE DEVICES

被引：0
|
作者：
CHI, GC
MOGAB, CJ
机构：
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1985年 / 21卷 / 02期
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
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页码：1170 / 1173
页数：4
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