Optimal collimation of a charged particle beam in probe-forming systems

被引：0
|
作者：
A. G. Ponomarev
机构：
[1] National Academy of Sciences of Ukraine,Institute of Applied Physics
来源：
Technical Physics | 2009年 / 54卷
关键词：
41.85.-p; 41.85.Ct; 41.85.Lc; 41.88.Si;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
An approach to determining optimal sizes of collimators used for producing the initial phase set of a charged particle beam with the maximal volume at the inlet to the probe-forming system is described. This ensures beam focusing to a spot on a target with preset parameters and with the maximal current. The dynamics of phase sets is considered taking into account nonlinear effects associated with aberrations.
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页码：276 / 280
页数：4
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