Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition

被引：0
|
作者：
N. I. Fainer
A. G. Plekhanov
Yu. M. Rumyantsev
E. A. Maximovskii
V. R. Shayapov
A. G. Plekhanov
Yu. M. Rumyantsev
E. A. Maximovskii
V. R. Shayapov
机构：
[1] Russian Academy of Sciences,Nikolaev Institute of Inorganic Chemistry, Siberian Branch
来源：
Glass Physics and Chemistry | 2014年 / 40卷
关键词：
silicon oxycarbonitride thin films; plasma chemical synthesis; nanocomposite films; phases of the α- Si; C; N; family;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The method of preparation of hydrogenated silicon oxycarbonitride films with variable composition SiCxNyOz: H by the plasma chemical vapor decomposition of a volatile organosilicon compound, 1,1,1,3,3,3-hexamethyldisilazane (enhanced to IUPAC, bis(trimethylsilyl)amine) in a gas phase containing nitrogen and oxygen in the temperature range of 373–973 K has been developed. It has been shown that nitrogen and oxygen provide the decrease in carbon content in films due to gas-phase reaction giving volatile products (CN)2, CH4, CO, and H2(H). The obtained SiCxNyOz: H films are nanocomposite, in the amorphous part of which the nanocrystals are distributed, which belong to the determined phases of the Si-C-N system, namely, α-Si3N4, α-Si3 − xCxN4, and graphite.
引用
收藏
页码：570 / 577
页数：7
相关论文
共 50 条
  • [1] Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition
    Fainer, N. I.
    Plekhanov, A. G.
    Rumyantsev, Yu. M.
    Maximovskii, E. A.
    Shayapov, V. R.
    GLASS PHYSICS AND CHEMISTRY, 2014, 40 (05) : 570 - 577
  • [2] Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties
    Fainer, N. I.
    Plekhanov, A. G.
    Rumyantsev, Yu M.
    Yushina, I. V.
    Shayapov, V. R.
    Kichai, V. N.
    GLASS PHYSICS AND CHEMISTRY, 2014, 40 (06) : 643 - 649
  • [3] Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties
    N. I. Fainer
    A. G. Plekhanov
    Yu. M. Rumyantsev
    I. V. Yushina
    V. R. Shayapov
    V. N. Kichai
    Glass Physics and Chemistry, 2014, 40 : 643 - 649
  • [4] The phase composition and physicochemical properties of transparent nanocomposite films of silicon oxycarbonitride
    A. G. Plekhanov
    N. I. Fainer
    Yu. M. Rumyantsev
    I. V. Yushina
    M. I. Rakhmanova
    Journal of Structural Chemistry, 2016, 57 : 1209 - 1215
  • [5] The phase composition and physicochemical properties of transparent nanocomposite films of silicon oxycarbonitride
    Plekhanov, A. G.
    Fainer, N. I.
    Rumyantsev, Yu. M.
    Yushina, I. V.
    Rakhmanova, M. I.
    JOURNAL OF STRUCTURAL CHEMISTRY, 2016, 57 (06) : 1209 - 1215
  • [6] Structure and elemental composition of transparent nanocomposite silicon oxycarbonitride films
    N. I. Fainer
    A. G. Plekhanov
    A. N. Golubenko
    Yu. M. Rumyantsev
    E. A. Maksimovskii
    V. R. Shayapov
    Journal of Structural Chemistry, 2017, 58 : 119 - 125
  • [7] STRUCTURE AND ELEMENTAL COMPOSITION OF TRANSPARENT NANOCOMPOSITE SILICON OXYCARBONITRIDE FILMS
    Fainer, N. I.
    Plekhanov, A. G.
    Golubenko, A. N.
    Rumyantsev, Yu. M.
    Maksimovskii, E. A.
    Shayapov, V. R.
    JOURNAL OF STRUCTURAL CHEMISTRY, 2017, 58 (01) : 119 - 125
  • [8] Hydrogenated silicon oxycarbonitride films. Part III. Thermodynamic modeling of the Si-C-N-O-H system
    Golubenko, A. N.
    Fainer, N. I.
    Titova, E. F.
    GLASS PHYSICS AND CHEMISTRY, 2015, 41 (03) : 334 - 339
  • [9] Electrochemically deposited thin films of amorphous Fe-P alloy Part I. Chemical composition and phase structure characterization
    Zecevic, SK
    Zotovic, JB
    Gojkovic, SL
    Radmilovic, V
    JOURNAL OF ELECTROANALYTICAL CHEMISTRY, 1998, 448 (02) : 245 - 252
  • [10] Hydrogenated silicon oxycarbonitride films. Part III. Thermodynamic modeling of the Si-C-N-O-H system
    A. N. Golubenko
    N. I. Fainer
    E. F. Titova
    Glass Physics and Chemistry, 2015, 41 : 334 - 339
12345