Numerical simulation of atomic nitrogen formation in plasma of glow discharge in nitrogen-argon mixture

被引：0

作者：

V. A. Khomich

A. V. Ryabtsev

E. G. Didyk

V. A. Zhovtyansky

V. G. Nazarenko

机构：

[1] National Academy of Sciences of Ukraine,Institute of Physics

[2] National Academy of Sciences of Ukraine,Institute of Gas

来源：

Technical Physics Letters | 2010年 / 36卷

关键词：

Glow Discharge; Technical Physic Letter; Molecular Nitrogen; Electron Energy Distribution Function; Glow Discharge Plasma;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We consider the problem of determining the content of atomic nitrogen as an active component responsible for the efficiency of metal surface modification in plasma of stationary low-pressure glow discharge in nitrogen-argon mixture (widely used in this technology). The influence of the gas mixture composition on the rate constant of molecular nitrogen dissociation, which determines the atomic nitrogen production, has been calculated, The parameters of plasma have been experimentally determined using the method of double probes. The electron energy distribution function is found by numerically integrating the Boltzmann equation in a two-term approximation for the molecular nitrogen-argon mixture.

引用

页码：918 / 922

页数：4

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