Simulation and experiment of low-pressure oxygen - Nitrogen mixture gas glow discharge plasma

被引:3
|
作者
Ono, S [1 ]
Kato, H [1 ]
Teii, S [1 ]
机构
[1] Musashi Inst Technol, Dept Elect & Elect Engn, Setagaya Ku, Tokyo 158, Japan
关键词
oxygen; nitrogen; plasma; discharge; probe;
D O I
10.1080/00102209808952033
中图分类号
O414.1 [热力学];
学科分类号
摘要
Oxygen-nitrogen mixture gas plasma has been studied theoretically and experimentally to understand the basic property of the plasma. Large volume spatially uniform plasma was assumed for simplicity. 17 kinds of species and their various reactions were considered. The effect of nitrogen gas mixing appeared in the oxygen atom density in the plasma. The experimental confirmation has also been done and discussed.
引用
收藏
页码:151 / 160
页数:10
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