Brillouin light scattering characterization of the surface acoustic wave velocity in sp2 allotropes thin films

被引:0
|
作者
E. Salas
R. J. Jiménez-Riobóo
A. de Andrés
C. Prieto
机构
[1] Instituto de Ciencia de Materiales de Madrid,Consejo Superior de Investigaciones Científicas
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关键词
Substrate Temperature; Surface Acoustic Wave; Bulk Acoustic Wave; Magnetron Sput; Rayleigh Mode;
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学科分类号
摘要
Carbon thin films have been deposited by DC magnetron sputtering at different substrate temperatures ranging from 200 K to 400 K. The influence of the preparation substrate temperature on the elastic properties has been evidenced by means of the High Resolution Brillouin Spectroscopy. Thus, the surface acoustic wave (SAW) velocity evolution could be assessed for the different samples. The observed variation is analysed in terms of the relative population of sp2 allotropes phases forming the film.
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页码:151 / 155
页数:4
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