共 50 条
- [21] Electron behaviour in CH4/H2 gas mixture in electron-assisted chemical vapour deposition CHINESE PHYSICS, 2004, 13 (10): : 1597 - 1600
- [25] Gas-jet synthesis of diamond-like films from an H2 + CH4 gas mixture glow Journal of Applied Mechanics and Technical Physics, 2014, 55 : 270 - 275
- [28] Inductively coupled plasma etching of InP using CH4/H2 and CH4/H2/N2 JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (01): : 47 - 52
- [29] Modeling the flow of activated H2 + CH4 mixture by deposition of diamond nanostructures XXXIII SIBERIAN THERMOPHYSICAL SEMINAR (STS-33), 2017, 115