Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology

被引：0
|
作者：
D.J.W. Klunder
E. Krioukov
F.S. Tan
T. van der Veen
H.F. Bulthuis
G. Sengo
C. Otto
H.J.W.M. Hoekstra
A. Driessen
机构：
[1] Lightwave Devices Group,
[2] MESA+ Research Institute,undefined
[3] University of Twente,undefined
[4] P.O. Box 217,undefined
[5] 7 500 AE Enschede,undefined
[6] The Netherlands,undefined
[7] Biophysical Techniques Group,undefined
[8] MESA+ Research Institute,undefined
[9] University of Twente,undefined
[10] P.O. Box 217,undefined
[11] 7 500 AE Enschede,undefined
[12] The Netherlands,undefined
[13] Kymata Netherlands,undefined
[14] Coloseum 11,undefined
[15] 7 521 PV,undefined
[16] Enschede,undefined
[17] The Netherlands,undefined
来源：
Applied Physics B | 2001年 / 73卷
关键词：
PACS: 42.82.Bq; 42.82.Et;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.
引用
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页码：603 / 608
页数：5
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